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Specifications

The DC bias power supply is commonly used in electrical arc ion plating

The DC bias power supply is commonly used in electrical arc ion plating, DC magnetron sputtering, magnetron sputtering ion plating, unbalanced magnetron sputtering, and twin magnetron sputtering systems for substrate bias during film deposition.

The main features of these power inverters include: glow discharge substrate surface cleaning, ion bombardment during thin film deposition, substrate surface temperature control and so on. Using proper biasing parameters, one not only can avoid surface arcing to increase products yield but also can enhance surface smoothness and thin film/substrate adhesion.

Main Specification 

Model

Power

Working Voltage

Max. Working Current

Working Mode

Cooling Mode

Cabinet Dimension

BD-5

5kW

100-1000V

5A

CV, CC, CP

Wind

6U

 

 

50-500V

10A

 

 

 

BD-10

10kW

100-1000V

10A

CV, CC, CP

Wind

6U

 

 

50-500V

20A

 

 

 

BD-20

20kW

100-1000V

20A

CV, CC, CP

Water

7U

 

 

50-500V

40A

 

 

 

BD-40

40kW

100-1000V

40A

CV, CC, CP

Water

1.2m cabinet

 

 

50-500V

80A

 

 

 

BD-60

60kW

100-1000V

60A

CV, CC, CP

Water

1.6m cabinet

 

 

50-500V

120A

 

 

 

BD-100

100kW

100-1000V

100A

CV, CC, CP

Water

1.8m cabinet

 

 

50-500V

200A

 

 

 

CV: Constant Voltage; CC: Constant Current; CP: Constant Power

Optional: Remote control by PLC

Cabinet Dimension Table

Item Number

Cabinet Model

Body Dimension (mm)

Front Panel Dimension (mm)

Front Panel Holder

Back Panel Port

1

6U

W435xH270xD560

W480xH290

50mm

100mm

2

7U

W435xH315xD550

W480xH345

50mm

100mm

3

7U+

W435xH315xD705

W480xH345

50mm

100mm

Item Number

Cabinet Model

Body Dimension (mm)

Body Dimension with Uplift Holders and Wheels (mm)

Backdoor

1

1.2m

W600xH1220xD700

W600xH1255xD700

Single Door Opening

2

1.6m

W600xH1620xD800

W600xH1720xD800

Single Door Opening

3

1.8m

W600xH1800xD800

W600xH1890xD800

Single Door Opening

4

2.0m

W600xH2060xD800

W600xH2150xD800

Single Door Opening

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