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Specifications

The DC/Pulse bias power supply is commonly used in electrical arc ion plating

DC/Pulse Bias Power Supply 

                                     

The DC/Pulse bias power supply is commonly used in electrical arc ion plating, DC magnetron sputtering, magnetron sputtering ion plating, unbalanced magnetron sputtering, and twin magnetron sputtering systems for substrate bias during film deposition.

The main features of these power inverters include: glow discharge substrate surface cleaning, ion bombardment during thin film deposition, substrate surface temperature control and so on. Using proper biasing parameters, one not only can avoid surface arcing to increase products yield but also can enhance surface smoothness and thin film/substrate adhesion.  When using pulsed biasing, the arcing energy can be restrained during  glow discharge and thin film deposition to ensure an excellent substrate surface without damage.  Besides, a higher bias voltage can be applied in the pulsed bias mode than that in the DC bias mode, and the substrate temperature can be controlled via the adjustment of the pulsing frequency and duty cycle.   

  • Three operation modes: DC, Pulse, DC superposed Pulse.
  • The power supply is specially suitable for low-temperature, high-deposition-rate and high-quality coating systems.
  • The deposition rate, adhesive force, and temperature can be enhanced by adjusting the frequencies and duty cycles.

Main characteristics

  1. Advanced switching technology with small footprint, stable operation, low noise, and low electrical interference
  2. Auto current stabilizing function rednering stable operation under highly fluctuating electrical load
  3. Multiple circuit protection modes in the BP Series reducimg frequent arcing during operation and enabling continuous and stable operation under high-frequency arcing without circuit damage
  4. Multiple output modes on front panel facilitating flexible adjustment of the pulse bias, pulse duration, pulse frequency and so on

Main Specs:

  1. Output Duty Ratio:        10 - 80 %, continuously adjustable.
  2. Output Frequency:        40 kHz
  3. Power Input:                 Three phases 380 V + 10 %.
 

Model

Power

Pulse Voltage

Max. Pulse Current

DC Voltage

Max. DC Current

Working Mode

Cooling Mode

Cabinet Dimension

BDP-5

5kW

100-1000V

4.5A

20V-200V

5A

CV, CC, CP

Wind

7U+

BDP-10

10kW

100-1000V

9A

20V-200V

10A

CV, CC, CP

Wind

1.2m cabinet

BDP-20

20kW

100-1000V

18A

20V-200V

20A

CV, CC, CP

Water

1.2m cabinet

BDP-40

40kW

100-1000V

36A

20V-200V

40A

CV, CC, CP

Water

1.6m cabinet

BDP-60

60kW

100-1000V

54A

20V-200V

60A

CV, CC, CP

Water

1.8m cabinet

BDP-100

100kW

100-1000V

90A

20V-200V

100A

CV, CC, CP

Water

2.0m cabinet

 
 

CV: Constant Voltage; CC: Constant Current; CP: Constant Power

Optional: Remote control by PLC

Cabinet Dimension Table

Item Number

Cabinet Model

Body Dimension (mm)

Front Panel Dimension (mm)

Front Panel Holder

Back Panel Port

1

6U

W435xH270xD560

W480xH290

50mm

100mm

2

7U

W435xH315xD550

W480xH345

50mm

100mm

3

7U+

W435xH315xD705

W480xH345

50mm

100mm

Item Number

Cabinet Model

Body Dimension (mm)

Body Dimension with Uplift Holders and Wheels (mm)

Backdoor

1

1.2m

W600xH1220xD700

W600xH1255xD700

Single Door Opening

2

1.6m

W600xH1620xD800

W600xH1720xD800

Single Door Opening

3

1.8m

W600xH1800xD800

W600xH1890xD800

Single Door Opening

4

2.0m

W600xH2060xD800

W600xH2150xD800

Single Door Opening

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