Pulse Magnetron Power Supply

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Overview

Specifications

The power supply is mainly used for magnetron sputtering systems

Pulse Magnetron Power Supply

                                                   

The power supply is mainly used for magnetron sputtering systems.  It adopts an advanced high-frequency switching technology with excellent output characteristics and high adaptability.  The range of adjustment parameters is wide with stable current output.  It also offers high performance with proper safeguard protection, light weight, as well as small footprint. 

Main Characteristics

  1. Advanced switching technology with small footprint, stable operation, and low electrical interference
  2. Auto steady current function for stable operation under highly fluctuating electrical network and load
  3. Multiple circuit protections enabling continuous and stable operation under high-frequency arcing without circuit damage

Main Specifications

  1. Output Duty Ratio:        10 - 80 %, continuously adjustable.
  2. Output Frequency:        40 kHz
  3. Power Input:                 Three phases 380 V + 10 %.

Model

Power

Unload Voltage

Working Voltage

Max. Working Current

Working Mode

Cooling Mode

Cabinet Model

MSP-5

5kW

1000V

200-800V

7A

CV, CC, CP

Wind

7U+

MSP-10

10kW

1000V

200-800V

13A

CV, CC, CP

Wind

7U+

MSP-20

20kW

1000V

200-800V

25A

CV, CC, CP

Water

7U+

MSP-40

40kW

1000V

200-800V

50A

CV, CC, CP

Water

1.2m Cabinet

MSP-60

60kW

1000V

200-800V

75A

CV, CC, CP

Water

1.8m Cabinet

MSP-100

100kW

1000V

200-800V

125A

CV, CC, CP

Water

2m Cabinet

CV: Constant Voltage; CC: Constant Current; CP: Constant Power

Optional: Remote control by PLC

Cabinet Dimension Table

Item Number

Cabinet Model

Body Dimension (mm)

Front Panel Dimension (mm)

Front Panel Holder

Back Panel Port

1

6U

W435xH270xD560

W480xH290

50mm

100mm

2

7U

W435xH315xD550

W480xH345

50mm

100mm

3

7U+

W435xH315xD705

W480xH345

50mm

100mm

Item Number

Cabinet Model

Body Dimension (mm)

Body Dimension with Uplift Holders and Wheels (mm)

Backdoor

1

1.2m

W600xH1220xD700

W600xH1255xD700

Single Door Opening

2

1.6m

W600xH1620xD800

W600xH1720xD800

Single Door Opening

3

1.8m

W600xH1800xD800

W600xH1890xD800

Single Door Opening

4

2.0m

W600xH2060xD800

W600xH2150xD800

Single Door Opening